JPH0515071Y2 - - Google Patents
Info
- Publication number
- JPH0515071Y2 JPH0515071Y2 JP1615187U JP1615187U JPH0515071Y2 JP H0515071 Y2 JPH0515071 Y2 JP H0515071Y2 JP 1615187 U JP1615187 U JP 1615187U JP 1615187 U JP1615187 U JP 1615187U JP H0515071 Y2 JPH0515071 Y2 JP H0515071Y2
- Authority
- JP
- Japan
- Prior art keywords
- main body
- chamber
- diaphragm
- housing
- measurement
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000005259 measurement Methods 0.000 claims description 25
- 230000004888 barrier function Effects 0.000 claims description 19
- 239000000919 ceramic Substances 0.000 claims description 15
- 238000010586 diagram Methods 0.000 description 15
- 239000000463 material Substances 0.000 description 11
- 230000003068 static effect Effects 0.000 description 6
- 239000011521 glass Substances 0.000 description 5
- 239000012212 insulator Substances 0.000 description 5
- 239000007788 liquid Substances 0.000 description 4
- 125000006850 spacer group Chemical group 0.000 description 3
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000004593 Epoxy Substances 0.000 description 1
- 229910000990 Ni alloy Inorganic materials 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- ZGDWHDKHJKZZIQ-UHFFFAOYSA-N cobalt nickel Chemical compound [Co].[Ni].[Ni].[Ni] ZGDWHDKHJKZZIQ-UHFFFAOYSA-N 0.000 description 1
- 238000005336 cracking Methods 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 229910001039 duplex stainless steel Inorganic materials 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 229910000701 elgiloys (Co-Cr-Ni Alloy) Inorganic materials 0.000 description 1
- 239000000945 filler Substances 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 229920001296 polysiloxane Polymers 0.000 description 1
- 229920002379 silicone rubber Polymers 0.000 description 1
- 239000004945 silicone rubber Substances 0.000 description 1
Landscapes
- Measuring Fluid Pressure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1615187U JPH0515071Y2 (en]) | 1987-02-06 | 1987-02-06 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1615187U JPH0515071Y2 (en]) | 1987-02-06 | 1987-02-06 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63124639U JPS63124639U (en]) | 1988-08-15 |
| JPH0515071Y2 true JPH0515071Y2 (en]) | 1993-04-21 |
Family
ID=30807749
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1615187U Expired - Lifetime JPH0515071Y2 (en]) | 1987-02-06 | 1987-02-06 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0515071Y2 (en]) |
-
1987
- 1987-02-06 JP JP1615187U patent/JPH0515071Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPS63124639U (en]) | 1988-08-15 |
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